Achieving Ultra-Low Surface Roughness with MRF™ Technology

Case Study Summary

This case study explores how QED Technologies enhanced MRF to reliably achieve ultra-low surface roughness for high-performance optics. Targeting applications like EUV lithography, high-power laser optics, and X-ray mirrors, the team developed and tested new MR fluids including C30.

Results showed a significant reduction in surface roughness, achieving RMS values below 1.0 Å in some cases. When used with fused silica optics, the C30 fluid demonstrated consistent, predictable polishing with reduced flow pattern artifacts compared to conventional methods. These advancements make MRF a powerful tool for optics manufacturers seeking repeatable, sub-angstrom surface finishes for demanding optical systems.