MRF® Technology: Achieving Ultra-Low Surface Roughness

Case Study Summary

This case study highlights how QED Technologies improved Magnetorheological Finishing (MRF) to deliver deterministic, ultra-low surface roughness polishing—critical for applications like EUV lithography, X-ray mirrors, and high-power laser optics. While conventional methods can struggle to achieve <2 Å surfaces, MRF with the newly developed C30 fluid achieved RMS roughness as low as 1.0 Å, with consistent, repeatable results.

Comparisons using AFM and white light interferometry show that MRF not only outperforms traditional pitch polishing but also reduces MRF flow pattern artifacts and enhances microroughness performance across fused silica optics