Measurement of Non-Uniform AR Coated Surfaces Using Optical CMM

Case Study Summary

This case study demonstrates how QED’s NMF metrology systems can accurately measure challenging AR-coated optical surfaces, even in the presence of non-uniform coatings that distort typical optical signals. The study outlines the use of a model-based correction method that compensates for coating-induced errors, enabling precise surface form measurements on optics with extreme curvature and IR-optimized coatings. This highlights the unique capabilities of NMF to maintain nanometer-level accuracy for quality control in complex coating environments.

Topics: AR coatings, freeform optics, non-contact metrology, error compensation, optical CMM