High-Precision Asphere Measurements Using SSI™

Case Study Summary

This case study showcases SSI’s ability to perform sub-nanometer precision measurements on high-precision aspheres. By analyzing two sets of 10 stitched measurements with slightly different scan lattices, QED demonstrates pixel-by-pixel subtraction techniques that yield RMS differences around 0.1 nm. This level of agreement confirms the system’s capability to reliably characterize complex optical surfaces while staying within the noise limits of the Zygo reference interferometer.